Tian Yuan provides MEMS fabrication services for LWIR uncooled microbolometers based on thermally isolated microbridge structures. Our 8-inch wafer process integrates thin-film deposition, photolithography, etching, and sacrificial-layer release. With process control, we ensure stable sensing performance, optimized thermal conductance, and excellent device uniformity.

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Tian Yuan MEMS owns VOx deposition tool from Oxford Instruments, which is the most stable and leading VOx deposition tool in the Bolometer industry.