LWIR Microbolometer MEMS Fabrication Services

Tian Yuan provides MEMS fabrication services for LWIR uncooled microbolometer sensor structures. The process platform is focused on thermally isolated microbridge formation, integrating thin-film deposition, lithographic patterning, etching, sacrificial layer release, and wafer-level process control.

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Designed for uncooled infrared sensing applications, this MEMS fabrication capability supports controlled thermal conductance, stable sensing characteristics, and device-level uniformity. It serves as a key process foundation for LWIR thermal imaging sensor cores and compact thermal imaging modules.